Title:
DOUBLE SIDED ADHESIVE TAPE FOR FIXING POLISHING PAD
Document Type and Number:
WIPO Patent Application WO/2007/132881
Kind Code:
A1
Abstract:
Disclosed is a double sided adhesive tape for fixing a polishing pad, which enables
to improve the polishing accuracy of the polishing pad. Specifically disclosed
is a double sided adhesive tape (1) for fixing a polishing pad, which has adhesive
layers (3, 4) on both sides of a base (2). This double sided adhesive tape (1) is
characterized in that the base (2) is composed of a polyethylene terephthalate
film having a thickness of 150-300 μm, and the adhesive layer (3) is composed
of a synthetic rubber adhesive, while the adhesive layer (4) is composed of an
acrylic solvent adhesive.
Inventors:
FUKUOKA YOSHIYUKI (JP)
Application Number:
PCT/JP2007/060015
Publication Date:
November 22, 2007
Filing Date:
May 16, 2007
Export Citation:
Assignee:
SEKISUI CHEMICAL CO LTD (JP)
FUKUOKA YOSHIYUKI (JP)
FUKUOKA YOSHIYUKI (JP)
International Classes:
B24B37/20; B24B37/34; B24D11/00; C09J7/22; C09J7/38; C09J121/00; C09J133/00; C09J201/00; H01L21/304
Foreign References:
| JP2000071170A | 2000-03-07 | |||
| JP2002294179A | 2002-10-09 | |||
| JP2005081486A | 2005-03-31 | |||
| JP2004300231A | 2004-10-28 | |||
| JP2006265410A | 2006-10-05 | |||
| JPH05271630A | 1993-10-19 |
Attorney, Agent or Firm:
SUGIMOTO, Katsunori (14-22 Shitennoji 1-chome,Tennoji-ku, Osaka-shi, Osaka 51, JP)
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