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Title:
DOUBLE VACUUM PUMP APPARATUS, GAS PURIFICATION SYSTEM PROVIDED WITH DOUBLE VACUUM PUMP APPARATUS, AND EXHAUST GAS VIBRATION SUPPRESSING DEVICE IN DOUBLE VACUUM PUMP APPARATUS
Document Type and Number:
WIPO Patent Application WO/2011/078207
Kind Code:
A1
Abstract:
Disclosed is a double vacuum pump apparatus (Y2) provided with positive displacement vacuum pumps (40A, 40B) and lines (52, 60). Each vacuum pump has a suction port (41) and a discharge port (42), and a pressure detector (80) is provided near the suction port (41) of the double vacuum pump apparatus (Y2). The line (52) interconnects the discharge port (42) of the vacuum pump (40A) and the suction port (41) of the vacuum pump (40B). The line (60) has an end (E6), which is connected to the interconnection line (52), and an end (E5), and includes a buffer tube (Z1) and an on-off valve (61) located between the tube (Z1) and the end (E5). The pressure detection signal from the pressure detector (80) is used as an on-off signal to the on-off valve (61).

Inventors:
HARUNA KAZUO (JP)
MARUTA KIYOKAZU (JP)
KUWATA HIDENORI (JP)
SHIMA KOICHI (JP)
Application Number:
PCT/JP2010/073091
Publication Date:
June 30, 2011
Filing Date:
December 22, 2010
Export Citation:
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Assignee:
SUMITOMO SEIKA CHEMICALS (JP)
HARUNA KAZUO (JP)
MARUTA KIYOKAZU (JP)
KUWATA HIDENORI (JP)
SHIMA KOICHI (JP)
International Classes:
F04B37/16; B01D53/04
Foreign References:
JPH10296034A1998-11-10
JPH06254333A1994-09-13
JP2001212419A2001-08-07
JP2006272325A2006-10-12
JPH10296034A1998-11-10
JP2006272325A2006-10-12
Other References:
See also references of EP 2518317A4
Attorney, Agent or Firm:
YOSHIDA Minoru et al. (JP)
Yoshida 稔 (JP)
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