Title:
DRAWING DATA GENERATION METHOD, DRAWING DATA GENERATION APPARATUS, DRAWING DATA GENERATION PROGRAM, EXPOSURE SYSTEM, AND DEVICE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2023/238200
Kind Code:
A1
Abstract:
Provided is a drawing data generating method, said data representing a drawing pattern to be formed by a spatial light modulator in order to form a predetermined exposure pattern atop a substrate by means of exposure light. In order to shorten the time for generating data representing a pattern to be generated by a spatial light modulator, the method is configured so that a computer executes the following: generating first drawing data representing a first drawing pattern corresponding to a first pattern, from design data representing a design pattern which corresponds to the predetermined exposure pattern and in which a second pattern including a plurality of repeatedly arranged first patterns is repeatedly arranged; generating second drawing data representing a second drawing pattern corresponding to the second pattern on the basis of the generated first drawing data and first information indicating the repeated form of the first pattern; and generating drawing data representing a drawing pattern on the basis of the generated second drawing data and second information indicating the repeated form of the second pattern.
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Inventors:
KANAYA YUHO (JP)
Application Number:
PCT/JP2022/022827
Publication Date:
December 14, 2023
Filing Date:
June 06, 2022
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G03F7/20
Foreign References:
| JP2008197451A | 2008-08-28 | |||
| JP2010080777A | 2010-04-08 | |||
| JP2007271743A | 2007-10-18 | |||
| JP2006251036A | 2006-09-21 |
Attorney, Agent or Firm:
KATAYAMA, Shuhei (JP)
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