DRAWING DEVICE AND DEFLECTOR

WIPO Patent Application WO/2021/033714

A1

[Problem] To provide a drawing device and a deflector that make it possible to improve the accuracy of blanking control of a charged particle beam while also curbing charge-up of an electrode of the deflector. [Solution] A blanking deflector according to the present embodiment is provided with: a first electrode including a first insulator, a first material film that covers the entire surface of the first insulator and has a lower resistance than the first insulator, and a first low-resistivity film that covers all or part of the surface of the first material film and has a lower resistance than the first material film; and a second electrode including a second insulator, a second material film that covers the entire surface of the second insulator and has a lower resistance than the second insulator, and a second low-resistivity film that covers all or part of the surface of the second material film and has a lower resistance than the second material film. The blanking deflector controls whether to have a charged particle beam pass between the first electrode and the second electrode to irradiate a sample therewith.

WO/2023/053187	MACHINING METHOD AND CHARGED PARTICLE BEAM DEVICE
JP2000049086	CHARGED PARTICLE BEAM TRANSFER DEVICE
JPS6138931	[Title of the device] Charged particle beam drawing device

KISHI KAZUHIRO (JP)
OGASAWARA MUNEHIRO (JP)

PCT/JP2020/031271

February 25, 2021

August 19, 2020

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NUFLARE TECHNOLOGY INC (JP)

H01J37/305; G03F7/20; H01L21/027

JP2018098268A	2018-06-21
JP2016076548A	2016-05-12
JP2010225728A	2010-10-07
JP2006108119A	2006-04-20
JP2002100317A	2002-04-05
JP2000106117A	2000-04-11

NAKAMURA Yukitaka et al. (JP)

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