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Patent Searching and Data


Title:
DRAWING DEVICE, EXPOSURE DRAWING DEVICE, DRAWING METHOD, AND RECORDING MEDIUM WHEREON PROGRAM IS STORED
Document Type and Number:
WIPO Patent Application WO/2014/027483
Kind Code:
A1
Abstract:
In the present invention, coordinate data indicating the first positions in a design of a plurality of reference marks that are provided to a substrate to be exposed, coordinate data indicating a drawing pattern to be drawn on the substrate to be exposed that is set using the first positions as a reference, and coordinate data indicating the actual second positions of each of the plurality of reference marks are acquired, a deviation correction amount for correcting the deviation between the first position and the second position is derived for each of the plurality of reference marks, each of the derived deviation correction amounts is reduced by a preset rate, and when drawing the drawing pattern on the substrate to be exposed in accordance with coordinate data that indicates a drawing pattern in which the coordinate data that indicates the second positions is used as a reference, coordinate data indicating the drawing pattern in accordance with the reduced deviation correction amount is corrected.

Inventors:
KIKUCHI, Hiroaki (577 Ushijima, Kaisei-machi, Ashigarakami-gu, Kanagawa 77, 〒2588577, JP)
Application Number:
JP2013/062291
Publication Date:
February 20, 2014
Filing Date:
April 25, 2013
Export Citation:
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Assignee:
FUJIFILM CORPORATION (26-30, Nishiazabu 2-chome Minato-k, Tokyo 20, 〒1068620, JP)
International Classes:
G03F9/00; G03F7/20; H01L21/027; H05K3/00
Foreign References:
JP2005283893A
JP2008058797A
JP2011022329A
JP2008251797A
JP2011107348A
JP2006251160A
JP2009290119A
JP2009223262A
JP2011095742A
JP2005157326A
Attorney, Agent or Firm:
NAKAJIMA, Jun et al. (TAIYO, NAKAJIMA & KATO Seventh Floor, HK-Shinjuku Bldg., 3-17, Shinjuku 4-chome, Shinjuku-k, Tokyo 22, 〒1600022, JP)
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