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Title:
DRESSER
Document Type and Number:
WIPO Patent Application WO/2018/043054
Kind Code:
A1
Abstract:
The present invention provides a dresser provided with a diamond plate on which diamond abrasive grains, for dressing upper and lower polishing cloths of a double-side polishing machine, are fixed, the dresser being characterized by being provided with: an inner ring (2); an outer ring (3) having a larger diameter than the inner ring, disposed to be concentric with the inner ring and outside the inner ring, and having a connection part connected to the inner ring; and a diamond plate (5) disposed between the inner ring and the outer ring, having a side surface retained by an outer peripheral portion of the inner ring and an inner peripheral portion of the outer ring, and having a greater thickness than the inner ring and the outer ring, wherein the diamond plate is retained in a non-fixed manner in the thickness direction of the diamond plate by the outer peripheral portion of the inner ring and the inner peripheral portion of the outer ring and can float in the thickness direction of the diamond plate. Thus, there is provided a dresser having a high thickness precision, enabling uniform dressing to be efficiently performed, and having a lighter weight than conventional dressers.

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Inventors:
ASAI Kazumasa (1393, Yashiro, Chikuma-sh, Nagano 55, 〒3878555, JP)
TAKANO Tomofumi (1393, Yashiro, Chikuma-sh, Nagano 55, 〒3878555, JP)
Application Number:
JP2017/028633
Publication Date:
March 08, 2018
Filing Date:
August 07, 2017
Export Citation:
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Assignee:
SHIN-ETSU HANDOTAI CO.,LTD. (2-1 Ohtemachi 2-chome, Chiyoda-ku Tokyo, 04, 〒1000004, JP)
International Classes:
B24B53/12; B24B53/017; H01L21/304
Foreign References:
JP2000190200A2000-07-11
JP2014147993A2014-08-21
JP2004098214A2004-04-02
JP2001179600A2001-07-03
JP2015071224A2015-04-16
Attorney, Agent or Firm:
YOSHIMIYA Mikio et al. (1st Shitaya Bldg. 8F, 6-11 Ueno 7-chome, Taito-k, Tokyo 05, 〒1100005, JP)
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