Title:
DRIVE DEVICE AND SUBSTRATE PROCESSING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2013/047519
Kind Code:
A1
Abstract:
A drive device having two rotating axes (an outside output axis and an inside output axis) on the same axis, wherein a vacuum seal is arranged between a main case and the outside output axis, and, in addition, a vacuum seal is arranged between the outside output axis and the inside output axis, thereby separating the space inside the main case of the drive device and the space outside the main case. As a result, even if the drive device is used in a low-pressure environment, the space inside the main case of the drive device (atmospheric-pressure environment side) and the space on a low-pressure environment side can be separated, thereby enabling the drive device to be used in a low-pressure environment.
Inventors:
HIROKI TSUTOMU (JP)
KATO TOSHINAO (JP)
KATO TOSHINAO (JP)
Application Number:
PCT/JP2012/074558
Publication Date:
April 04, 2013
Filing Date:
September 25, 2012
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
F16H37/06; B25J17/00; F16H25/18; F16H57/029; H01L21/677
Foreign References:
| JPH01120336U | 1989-08-15 | |||
| JP2002059329A | 2002-02-26 | |||
| EP2246514A1 | 2010-11-03 | |||
| JP2002096285A | 2002-04-02 | |||
| JP2008091534A | 2008-04-17 | |||
| JP2004092871A | 2004-03-25 | |||
| JPH11198070A | 1999-07-27 | |||
| JP2000110894A | 2000-04-18 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
Yoshiki Hasegawa (JP)
Yoshiki Hasegawa (JP)
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Claims: