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Patent Searching and Data


Title:
DROPLET COLLECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/042563
Kind Code:
A1
Abstract:
This droplet collection device is provided with: a collecting container which is provided to an outer wall surface side of a wall of a chamber, and which is formed so as to communicate with the inside of the chamber via an opening provided in the wall of the chamber; a collision plate which is provided inside the collecting container, and with which droplets supplied to the collecting container from the opening are made to collide; and buffer members which are provided further toward the side of the opening than the collision plate, and which soften the impact of the droplets that collide with the collision plate. The buffer members are provided with wire bundles which are fixed to plate members, and in which a plurality of wires are bundled. The plurality of wires are respectively formed from carbon. The plate members are formed from graphite. A graphitized adhesive may be used to fix, to the plate members, the plurality of wires in a state of being arranged in one direction.

Inventors:
KAMIKANNA Kazukiyo (400 Oaza Yokokurashinden, Oyama-sh, Tochigi 58, 〒3238558, JP)
IWAMOTO Fumio (400 Oaza Yokokurashinden, Oyama-sh, Tochigi 58, 〒3238558, JP)
Application Number:
JP2016/075529
Publication Date:
March 08, 2018
Filing Date:
August 31, 2016
Export Citation:
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Assignee:
GIGAPHOTON INC. (400 Oaza Yokokurashinden, Oyama-shi Tochigi, 58, 〒3238558, JP)
International Classes:
H05G2/00
Attorney, Agent or Firm:
MORIMURA Yasuo (Akihabara Hanaoka Building 6F, 10-9 Iwamotocho 3-chome, Chiyoda-k, Tokyo 32, 〒1010032, JP)
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