Title:
DROPLET COLLECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/042565
Kind Code:
A1
Abstract:
This droplet collection device is provided with: a collecting container which is provided to an outer wall surface side of a wall of a chamber, and which is formed so as to communicate with the inside of the chamber via an opening provided in the wall of the chamber; a collision plate which is provided inside the collecting container, and with which droplets supplied to the collecting container from the opening are made to collide; and shielding plates which are provided further towards the side of the opening than the collision plate, and which are provided with through holes through which the droplets supplied to the collecting container pass. Wire bundles in which a plurality of wires are bundled may be provided in the through holes in the shielding plates.
Inventors:
KAMIKANNA KAZUKIYO (JP)
Application Number:
PCT/JP2016/075532
Publication Date:
March 08, 2018
Filing Date:
August 31, 2016
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H05G2/00
Domestic Patent References:
| WO2015097888A1 | 2015-07-02 | |||
| WO2015063825A1 | 2015-05-07 |
Foreign References:
| JP2008226462A | 2008-09-25 | |||
| JP2013131483A | 2013-07-04 | |||
| JP2000091095A | 2000-03-31 |
Attorney, Agent or Firm:
MORIMURA Yasuo (JP)
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