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Patent Searching and Data


Title:
DROPLET DETECTOR AND EUV LIGHT GENERATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/029863
Kind Code:
A1
Abstract:
This droplet detector (8) may comprise: an irradiation unit (41) for emitting pulsed light (DPL) at a predetermined period and irradiating a plurality of pulsed light (DPL) onto a droplet (DL) moving in a detection region on a trajectory (OT); and a photo-reception unit (42) for receiving pulsed scattered light (PSL) generated by the plurality of pulsed light (DPL) irradiated onto the droplet (DL) being scattered by the droplet (DL).

Inventors:
YANAGIDA Tatsuya (400 Oaza Yokokurashinden, Oyama-sh, Tochigi 58, 〒3238558, JP)
Application Number:
JP2016/073795
Publication Date:
February 15, 2018
Filing Date:
August 12, 2016
Export Citation:
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Assignee:
GIGAPHOTON INC. (400 Oaza Yokokurashinden, Oyama-shi Tochigi, 58, 〒3238558, JP)
International Classes:
H05G2/00
Domestic Patent References:
WO2016013515A12016-01-28
WO2013161760A12013-10-31
WO2016013550A12016-01-28
Foreign References:
JP2012523694A2012-10-04
Attorney, Agent or Firm:
MORIMURA Yasuo (Akihabara Hanaoka Building 6F, 10-9 Iwamotocho 3-chome, Chiyoda-k, Tokyo 32, 〒1010032, JP)
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