Title:
DROPLET DETECTOR AND EXTREME ULTRAVIOLET RADIATION GENERATOR
Document Type and Number:
WIPO Patent Application WO/2016/170972
Kind Code:
A1
Abstract:
The purpose of the present invention is to improve the stability of operation of an EUV radiation generator. This droplet detector may comprise a light source which irradiates illuminating light onto droplets which generate extreme ultraviolet radiation when laser light outputted within a chamber is irradiated thereupon; a light-receiving unit that receives illuminating light and detects variations in light intensity; and a timing determination circuit that outputs a droplet detection signal that indicates that a droplet has been detected at a predetermined position within the chamber, on the basis of first timing with which the light intensity of illuminating light irradiated onto the droplet decreases, and second timing with which the intensity of illuminating light increases.
Inventors:
SATOU KOUICHI (JP)
YABU TAKAYUKI (JP)
UENO YOSHIFUMI (JP)
HOSODA HIROKAZU (JP)
YABU TAKAYUKI (JP)
UENO YOSHIFUMI (JP)
HOSODA HIROKAZU (JP)
Application Number:
PCT/JP2016/061151
Publication Date:
October 27, 2016
Filing Date:
April 05, 2016
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H05G2/00
Domestic Patent References:
| WO2014189055A1 | 2014-11-27 |
Foreign References:
| JP2014235805A | 2014-12-15 | |||
| JP2006110774A | 2006-04-27 | |||
| JP2007266234A | 2007-10-11 |
Attorney, Agent or Firm:
YANAGIDA Masashi et al. (JP)
Seiji Yanagida (JP)
Seiji Yanagida (JP)
Download PDF:
Previous Patent: ELECTROMAGNETIC CLUTCH FOR GAS COMPRESSOR, AND GAS COMPRESSOR
Next Patent: INTEGRATED CIRCUIT AND MEASURING DEVICE
Next Patent: INTEGRATED CIRCUIT AND MEASURING DEVICE