Title:
DRY FILM, CURED PRODUCT, LAMINATE, AND METHOD FOR FORMING RESIST PATTERN
Document Type and Number:
WIPO Patent Application WO/2016/158362
Kind Code:
A1
Abstract:
Provided is a dry film comprising a photosensitive layer and a non-photosensitive layer, said non-photosensitive layer containing a thermosetting resin.
Inventors:
IWASHITA KENICHI (JP)
MURAKAMI YASUHARU (JP)
NAKAMURA AKIHIRO (JP)
FUJIMOTO DAISUKE (JP)
MORITA MASAKI (JP)
ITOU AKIKO (JP)
MURAKAMI YASUHARU (JP)
NAKAMURA AKIHIRO (JP)
FUJIMOTO DAISUKE (JP)
MORITA MASAKI (JP)
ITOU AKIKO (JP)
Application Number:
PCT/JP2016/058045
Publication Date:
October 06, 2016
Filing Date:
March 14, 2016
Export Citation:
Assignee:
HITACHI CHEMICAL CO LTD (JP)
International Classes:
G03F7/004; C08G69/26; C08G73/14; C08L63/00; C08L77/00; G03F7/027; G03F7/038; G03F7/11; H05K3/28
Domestic Patent References:
| WO2013094606A1 | 2013-06-27 | |||
| WO2013099885A1 | 2013-07-04 |
Foreign References:
| JP2010238704A | 2010-10-21 | |||
| JP2004145013A | 2004-05-20 | |||
| JP2003330178A | 2003-11-19 | |||
| JP2009210972A | 2009-09-17 | |||
| JP2010197996A | 2010-09-09 | |||
| JP2008241741A | 2008-10-09 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
Yoshiki Hasegawa (JP)
Yoshiki Hasegawa (JP)
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