DRY ROOM AND METHOD FOR CONTROLLING SAME - NIHON SPINDLE MFG CO LTD

Title:

DRY ROOM AND METHOD FOR CONTROLLING SAME

Document Type and Number:

WIPO Patent Application WO/2020/202907

Kind Code:

A1

Abstract:

[Problem] The present invention addresses the problem of providing a dry room with which it is possible, when there is an increase in the humidity in a prescribed space in a dry booth, to efficiently adjust the in-room humidity and swiftly perform humidity management. [Solution] In order to solve the above problem, there is provided a dry room for controlling the dew point temperature in a managed space, wherein the dry room is characterized in being provided with a plurality of exhaust units for exhausting air in the managed space, the plurality of exhaust units being disposed in different regions in the managed space, and the exhaust amount of air exhausted from each of the regions being individually adjusted.　The humidity in the dry room is thereby efficiently adjusted and humidity management is swiftly performed, making it possible to provide a managed space in which the intended condition is maintained.

Inventors:

MASUDA KATSUHIRO (JP)
YAMAGUCHI MASAFUMI (JP)
UEDA AKIRA (JP)

Application Number:

PCT/JP2020/007547

Publication Date:

October 08, 2020

Filing Date:

February 25, 2020

Export Citation:

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Assignee:

NIHON SPINDLE MFG CO LTD (JP)

International Classes:

F24F7/06; F24F11/77; F24F11/89; F24F110/20

Foreign References:

JP2011190989A	2011-09-29
JPH04350434A	1992-12-04
JP2008045864A	2008-02-28
JP2014047990A	2014-03-17
JP2019143933A	2019-08-29
JP2018066542A	2018-04-26
JP2013081900A	2013-05-09
JP2014169815A	2014-09-18

Other References: