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Title:
DRY VACUUM PUMP UNIT AND METHOD FOR STARTING THE SAME, AND AIR-COOLED DRY VACUUM PUMP
Document Type and Number:
WIPO Patent Application WO/2010/061937
Kind Code:
A1
Abstract:
Disclosed is a dry vacuum pump unit which is small and lightweight so as to be movable to a required place by hand, and which can cool electric components or pumps by efficiently releasing heat generated from the components or the pumps.  The dry vacuum pump unit is comprised of a booster pump (4) disposed on the vacuum side, a main pump (5) disposed on the atmospheric pressure side, and a radiator plate (2) provided with cooling fins (11).  An electric component (3) is mounted on the radiator plate (2).  The booster pump (4) and the main pump (5) are attached to the radiator plate (2) via a pump mounting pedestal (14) comprised of a material having excellent thermal conductivity, or are directly attached to the radiator plate (2).

Inventors:
KASHIWABARA SATORU (JP)
FURUTA HIROKI (JP)
USUI KATSUAKI (JP)
IIJIMA NAOKI (JP)
OSUGA TORU (JP)
NIIMURA YASUHIRO (JP)
SEKIGUCHI SHINICHI (JP)
Application Number:
PCT/JP2009/070069
Publication Date:
June 03, 2010
Filing Date:
November 20, 2009
Export Citation:
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Assignee:
EBARA CORP (JP)
KASHIWABARA SATORU (JP)
FURUTA HIROKI (JP)
USUI KATSUAKI (JP)
IIJIMA NAOKI (JP)
OSUGA TORU (JP)
NIIMURA YASUHIRO (JP)
SEKIGUCHI SHINICHI (JP)
International Classes:
F04B37/16; F04C25/02
Foreign References:
JP2007231935A2007-09-13
JP2004324644A2004-11-18
JPS6315699Y21988-05-02
JP2007218568A2007-08-30
Attorney, Agent or Firm:
WATANABE, Isamu et al. (JP)
Isamu Watanabe (JP)
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