Title:
DUAL-CHANNEL SCATTERING-TYPE NEAR-FIELD SCANNING OPTICAL MICROSCOPE
Document Type and Number:
WIPO Patent Application WO/2017/135732
Kind Code:
A1
Abstract:
The present invention relates to a dual-channel scattering-type near-field scanning optical microscope and, more specifically, to a dual-channel scattering-type near-field scanning optical microscope characterized by two polarization states coexisting on the same path, each polarization beam forming independent interferometer, respectively, and polarization beams, which have different phases from each other, being measured in a dual-channel detector, respectively, thereby enabling quick measurement of only the optical-properties information of a specimen.
Inventors:
LEE EUN SEONG (KR)
KWON HYUKSANG (KR)
KWON HYUKSANG (KR)
Application Number:
PCT/KR2017/001191
Publication Date:
August 10, 2017
Filing Date:
February 03, 2017
Export Citation:
Assignee:
KOREA RES INST STANDARDS & SCI (KR)
International Classes:
G01Q60/18; G01J4/00; G02B5/30; G02B5/32; G02B27/10
Foreign References:
| KR100906508B1 | 2009-07-07 | |||
| KR100192097B1 | 1999-06-15 | |||
| US20050174578A1 | 2005-08-11 | |||
| KR20130039005A | 2013-04-19 | |||
| US20140233016A1 | 2014-08-21 |
Attorney, Agent or Firm:
PLUS INTERNATIONAL IP LAW FIRM (KR)
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