Title:
DUAL-LINE DRYING AND SINTERING FURNACE
Document Type and Number:
WIPO Patent Application WO/2018/177241
Kind Code:
A1
Abstract:
Disclosed is a dual-line drying and sintering furnace, comprising two supports (1) arranged in parallel. The two supports (1) have a certain spacing distance (11) therebetween, and the two supports (1) are both arranged on a main support. A chain conveying device (2), which is used for conveying a silicon wafer in the same direction, is driven by dual power and has an automatic tensioning function, is respectively arranged on the two supports (1). The two chain conveying devices (2) are successively provided with a drying region (3), a sintering region (4) and a cooling region (5) from an input end to an output end respectively. Multiple furnace chambers capable of independently controlling the temperature are arranged in a sintering furnace body (8) at intervals. An input end and an output end of the sintering furnace body (8) are both provided with an air extraction device (9). A material outlet end of a drying furnace body (6) and a material inlet end of the sintering furnace body (8) have a certain space therebetween. Material inlet ends of the two chain conveying devices (2) of the dual-line drying and sintering furnace are respectively in a direct butt-joint with conveyor tracks of a screen printer, and the two conveyor tracks simultaneously convey products. No transplanting device is required at a butting portion between the conveying device (2) and the screen printer, and products can be directly conveyed, which reduces the damage to the products, thereby improving the product quality.
Inventors:
LOU XIANLIANG (CN)
Application Number:
PCT/CN2018/080464
Publication Date:
October 04, 2018
Filing Date:
March 26, 2018
Export Citation:
Assignee:
FOLUNGWIN AUTOMATIC EQUIPMENT CO LTD (CN)
International Classes:
F27B9/02; F27B9/12; F27B9/24; F27B9/36; H01L31/024
Foreign References:
| CN107062894A | 2017-08-18 | |||
| CN206771986U | 2017-12-19 | |||
| CN106024984A | 2016-10-12 | |||
| CN201852420U | 2011-06-01 | |||
| CN103836919A | 2014-06-04 | |||
| CN105806085A | 2016-07-27 | |||
| CN103836941A | 2014-06-04 | |||
| JP2001133160A | 2001-05-18 |
Attorney, Agent or Firm:
SHENZHEN ZHIQUAN INTELLECTUAL PROPERTY OFFICE (CN)
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