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Patent Searching and Data


Title:
DUST COLLECTING CLEANER HAVING INTERFERENCE AVOIDANCE STRUCTURE
Document Type and Number:
WIPO Patent Application WO/2018/034363
Kind Code:
A1
Abstract:
The present invention relates to a dust collecting cleaner having an interference avoidance structure and, more particularly, to a dust collecting cleaner, having an interference avoidance structure, enabling removal of foreign materials in various forms generated during a surface treatment process for a substrate by means of an optical apparatus such as a laser. The dust collecting cleaner having an interference avoidance structure comprises: dust collecting housings (11a, 11b, 21) having open spaces (12, 22) formed on the central part thereof in the vertical direction with respect to an object to be treated; air knife units (15a, 15b, 25) disposed below the dust collecting housings (11a, 11b, 21); and a dust collecting path (DP) formed in front of the air knife units (15a, 15b, 25), wherein a gas flowing in and being sprayed from above the open space (12) and from the air knife units (15a, 15b, 25) flows into the dust collecting path (DP).

Inventors:
HWANG, Chang-Bae (1202-dong 902-ho, 63 Haengjeongjungang 1-ro,Hyangnam-eup, Hwaseong-si, Gyeonggi-do, 18600, KR)
Application Number:
KR2016/009090
Publication Date:
February 22, 2018
Filing Date:
August 18, 2016
Export Citation:
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Assignee:
NTK CORPORATION CO., LTD. (413-ho, 33 Omokcheon-ro 132beon-gil,Gwonseon-gu, Suwon-si, Gyeonggi-do, 16642, KR)
International Classes:
B08B15/00; B08B11/00; G02F1/13
Foreign References:
KR20160068607A2016-06-15
JP2008174246A2008-07-31
JP2007300129A2007-11-15
JPH11121435A1999-04-30
KR100965914B12010-06-24
Attorney, Agent or Firm:
YANG, Jeong-Kun (203-ho, Biz Center124, Sagimakgol-ro,Jungwon-gu, Seongnam-si, Gyeonggi-do, 13207, KR)
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