Title:
DUST COLLECTING DEVICE AND PLASMA APPARATUS
Document Type and Number:
WIPO Patent Application WO/2023/010607
Kind Code:
A1
Abstract:
Provided is a dust collecting device, which relates to the technical field of semiconductor manufacturing apparatuses. The dust collecting device comprises: an air intake channel (11); a dust settling channel (12), which extends along a predetermined path; an airflow rotating channel (13), which surrounds an outer side of the dust settling channel (12); an air output channel (14); and a collecting cavity (15). One end of the airflow rotating channel (13) is in communication with the dust settling channel (12), and the other end of the airflow rotating channel (13) is in communication with the air output channel (14); an upstream end of the dust settling channel (12) is in communication with the air intake channel (11), and a downstream end of the dust settling channel (12) is in communication with the collecting cavity (15); and the height of the dust settling channel (12) is gradually reduced in an extension direction of the predetermined path. By means of the dust collecting device, dust in the airflow rotating channel (13) can be conveniently settled down under the action of a centrifugal force when flowing along the airflow rotating channel (13); and the other end of the airflow rotating channel (13) is in communication with the air output channel (14), so as to discharge air.
Inventors:
WANG HUAIQING (CN)
Application Number:
PCT/CN2021/112220
Publication Date:
February 09, 2023
Filing Date:
August 12, 2021
Export Citation:
Assignee:
CHANGXIN MEMORY TECH INC (CN)
International Classes:
B01D45/16
Foreign References:
| CN208678689U | 2019-04-02 | |||
| CN206970550U | 2018-02-06 | |||
| CN206064647U | 2017-04-05 | |||
| CN107583363A | 2018-01-16 | |||
| CN204220314U | 2015-03-25 | |||
| CN110523204A | 2019-12-03 | |||
| JP2014004495A | 2014-01-16 |
Attorney, Agent or Firm:
SCIHEAD IP LAW FIRM (CN)
Download PDF: