Title:
DYE ADSORPTION APPARATUS AND DYE ADSORPTION METHOD
Document Type and Number:
WIPO Patent Application WO/2012/070176
Kind Code:
A1
Abstract:
[Problem] To significantly reduce the processing time of a step in which a coloring matter is adsorbed onto a porous semiconductor layer formed on the surface to be treated of a substrate. [Solution] A dye adsorption unit (20) includes a processing tank (30) of which the upper surface is opened, in order to perform a batch dye adsorption process for a batch processing number of substrates (G). The dye adsorption unit (20) further includes, as a moving system around the processing tank (30), a boat (32) capable of going in and out of the processing tank (30) from the upper opening, a boat transport unit (34) that serves for the boat (32) to go in and out of the processing tank (30), and a top cover (36) for detachably closing the upper opening. Further, the dye adsorption unit (20) includes a dye solution supply unit for supplying the dye solution into the processing tank (30), and a flow control unit for controlling the flow of the dye solution in the processing tank during the processing.
Inventors:
FURUTANI GORO (JP)
TERADA TAKASHI (JP)
FUKUDA YOSHITERU (JP)
WADA NORIO (JP)
TERADA TAKASHI (JP)
FUKUDA YOSHITERU (JP)
WADA NORIO (JP)
Application Number:
PCT/JP2011/005415
Publication Date:
May 31, 2012
Filing Date:
September 27, 2011
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
FURUTANI GORO (JP)
TERADA TAKASHI (JP)
FUKUDA YOSHITERU (JP)
WADA NORIO (JP)
FURUTANI GORO (JP)
TERADA TAKASHI (JP)
FUKUDA YOSHITERU (JP)
WADA NORIO (JP)
International Classes:
H01M14/00; H01L31/04
Domestic Patent References:
| WO2011105089A1 | 2011-09-01 | |||
| WO2010098088A1 | 2010-09-02 |
Foreign References:
| JP2001185244A | 2001-07-06 | |||
| JP2000348783A | 2000-12-15 | |||
| JP2002075472A | 2002-03-15 | |||
| JP2006244954A | 2006-09-14 |
Attorney, Agent or Firm:
SASAKI, Seikoh (JP)
Kiyotaka Sasaki (JP)
Kiyotaka Sasaki (JP)
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Claims: