Title:
DYE ADSORPTION DEVICE AND DYE ADSORPTION METHOD
Document Type and Number:
WIPO Patent Application WO/2013/118803
Kind Code:
A1
Abstract:
A dye adsorption device, wherein the dye adsorption time is significantly reduced compared to the prior art and productivity is improved, and the dye solution is used in an efficient manner at lower cost. This invention is provided with: a chamber (10) for housing the substrate (G) to be processed and forming a processing space (T); dye solution supply means (6, 7, 8) for supplying a dye solution (20) to the processing space; and decompression means (12, 13, 14) for performing decompression suction in the interior of the processing space. The decompression means dries the dye solution in the processing space under reduced pressure, causing the solvent in the dye solution to volatilize and the dye to be adsorbed by the semiconductor porous layer.
Inventors:
TERADA TAKASHI (JP)
Application Number:
PCT/JP2013/052805
Publication Date:
August 15, 2013
Filing Date:
February 07, 2013
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01M14/00; H01L31/04
Domestic Patent References:
| WO2011145229A1 | 2011-11-24 |
Foreign References:
| JP2005251591A | 2005-09-15 | |||
| JP2006279018A | 2006-10-12 | |||
| JP2004319872A | 2004-11-11 | |||
| JP2000348783A | 2000-12-15 | |||
| JP2009272074A | 2009-11-19 | |||
| JP2012003955A | 2012-01-05 | |||
| JP2002246076A | 2002-08-30 | |||
| JP2007299709A | 2007-11-15 |
Attorney, Agent or Firm:
KINOSHITA SHIGERU (JP)
Shigeru Kinoshita (JP)
Shigeru Kinoshita (JP)
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Claims: