Title:
DYNAMIC MAGNETIC STEEL MAGNETIC LEVITATION DUAL WORKPIECE STAGE VECTOR ARC STAGE SWITCHING METHOD AND DEVICE BASED ON ROTARY BALANCE MASS
Document Type and Number:
WIPO Patent Application WO/2017/121128
Kind Code:
A1
Abstract:
A dynamic-magnetic-steel magnetic-levitation dual-workpiece stage vector arc stage switching method and device based on rotary balance mass, belonging to the technical field of semiconductor manufacturing apparatuses. The device comprises a support frame (1), a balance mass block (2), a rotary shaft (10), magnetic levitation workpiece stages (4a, 4b), a workpiece stage measurement device and a workpiece stage drive device. Two workpiece stages work between a measurement station (11) and an exposure station (12). Plane gratings (5a, 5b) are used to measure positions of the workpiece stages. the workpiece stages are driven using a magnetic-levitation planar motor. during the switching process of dual-workpiece stages, the planer motor is used for driving the two workpiece stages, so as to achieve rapid single-beat arc stage switching. The method and device solve the problem that an existing stage switching scheme relates to many beats, a long track, many start-stop links and a long stabilization time, thereby reducing stage switching links, shortening a stage switching time, and improving the yield of a photoetching machine.
Inventors:
LIU YONGMENG (CN)
TAN JIUBIN (CN)
TAN JIUBIN (CN)
Application Number:
PCT/CN2016/097504
Publication Date:
July 20, 2017
Filing Date:
August 31, 2016
Export Citation:
Assignee:
HARBIN INSTITUTE TECHNOLOGY (CN)
International Classes:
G03F7/20; H01L21/02
Foreign References:
| CN102393613A | 2012-03-28 | |||
| CN101107571A | 2008-01-16 | |||
| CN105629676A | 2016-06-01 | |||
| CN102393611A | 2012-03-28 | |||
| CN103592820A | 2014-02-19 | |||
| CN103543613A | 2014-01-29 | |||
| US20030063289A1 | 2003-04-03 |
Attorney, Agent or Firm:
BEIJING KEYI INTELLECTUAL PROPERTY FIRM (CN)
Download PDF: