Title:
DYNAMIC PRESSURE SENSOR WITH IMPROVED OPERATION
Document Type and Number:
WIPO Patent Application WO/2016/097302
Kind Code:
A3
Abstract:
MEMS and/or NEMS pressure sensor including, in a substrate: a stationary portion and a portion that is movable relative to the stationary portion, the movable portion comprising a sensitive element (108) that is able to move in the plane of the sensor under the effect of a pressure variation; a stress gauge (18) for detecting the movement of the sensitive element (108) in the plane of the sensor due to the pressure variation; electrodes (24.1, 24.2) for actuating the sensitive element, said actuating electrodes being borne partially by the stationary portion and partially by the movable portion, said actuating electrodes being commanded so as to automatically control positionwise the movement of the sensitive element (108); and means (C) for commanding the actuating electrodes, which are configured, on the basis of signals emitted by the gauge, to bias the actuating electrodes so as to automatically control positionwise the movement of the sensitive element.
Inventors:
FAIN BRUNO (FR)
ROBERT PHILIPPE (FR)
VERDOT THIERRY (FR)
ROBERT PHILIPPE (FR)
VERDOT THIERRY (FR)
Application Number:
PCT/EP2015/080511
Publication Date:
August 11, 2016
Filing Date:
December 18, 2015
Export Citation:
Assignee:
COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES (FR)
International Classes:
G01L23/08
Foreign References:
EP2410767A1 | 2012-01-25 | |||
EP2541222A1 | 2013-01-02 | |||
EP2066015A2 | 2009-06-03 | |||
US6170332B1 | 2001-01-09 | |||
US6497149B1 | 2002-12-24 |
Other References:
BERNHARD E BOSER ET AL: "Surface Micromachined Accelerometers", IEEE JOURNAL OF SOLID-STATE CIRCUITS, IEEE SERVICE CENTER, PISCATAWAY, NJ, USA, vol. 31, no. 3, 1 March 1996 (1996-03-01), XP011060223, ISSN: 0018-9200
DIRK SCHEIBNER ET AL: "Frequency-selective silicon vibration sensor with direct electrostatic stiffness modulation", PROCEEDINGS OF SPIE, vol. 4755, 19 April 2002 (2002-04-19), US, pages 325 - 332, XP055225467, ISSN: 0277-786X, ISBN: 978-1-62841-839-2, DOI: 10.1117/12.462827
DIRK SCHEIBNER ET AL: "Frequency-selective silicon vibration sensor with direct electrostatic stiffness modulation", PROCEEDINGS OF SPIE, vol. 4755, 19 April 2002 (2002-04-19), US, pages 325 - 332, XP055225467, ISSN: 0277-786X, ISBN: 978-1-62841-839-2, DOI: 10.1117/12.462827
Attorney, Agent or Firm:
BREVALEX (Paris Cedex 8, Paris Cedex 8, FR)
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