Title:
DYNAMIC QUANTITY MEASURING DEVICE AND PRESSURE SENSOR USING SAME
Document Type and Number:
WIPO Patent Application WO/2015/190331
Kind Code:
A1
Abstract:
Provided are a dynamic quantity measuring device having higher accuracy and longer-term reliability than in the prior art, and a pressure sensor using the same.
A dynamic quantity measuring device is provided with a first Wheatstone bridge (A) configured by an impurity diffused resistor on a principal surface of one semiconductor substrate (1), and detects a difference between strain quantities respectively generated in an x-axis direction and a y-axis direction that are orthogonal to each other on the principal surface of the semiconductor substrate (1) by the first Wheatstone bridge (A), the dynamic quantity measuring device being provided with, on the principal surface of the semiconductor substrate (1), a second Wheatstone bridge (B) for detecting the strain quantity in the x-axis direction, and a third Wheatstone bridge (C) for detecting the strain quantity in the y-axis direction.
Inventors:
MIYAJIMA KENTAROU (JP)
Application Number:
PCT/JP2015/065717
Publication Date:
December 17, 2015
Filing Date:
June 01, 2015
Export Citation:
Assignee:
HITACHI AUTOMOTIVE SYSTEMS LTD (JP)
International Classes:
G01L9/00; G01L27/00
Foreign References:
| JP2002039891A | 2002-02-06 |
Other References:
See also references of EP 3153833A4
Attorney, Agent or Firm:
INOUE Manabu et al. (JP)
Manabu Inoue (JP)
Manabu Inoue (JP)
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