Title:
DYNAMIC QUANTITY MEASURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2013/084294
Kind Code:
A1
Abstract:
In the present invention, a dynamic quantity measuring device (semiconductor strain sensor) has a semiconductor chip in which a plurality of piezoresistive elements are formed on the surface of a semiconductor substrate, a lead-out wiring part electrically connected to a plurality of electrodes on the semiconductor chip, and a plate joined to the rear surface of the semiconductor chip. The plate is provided with a first region facing the rear surface of the semiconductor chip and a second region arranged on both sides of or surrounding the first region, the thickness of the plate in the first region being greater than the thickness in the second region.
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Inventors:
ASHIDA KISHO (JP)
OHTA HIROYUKI (JP)
OHTA HIROYUKI (JP)
Application Number:
PCT/JP2011/078183
Publication Date:
June 13, 2013
Filing Date:
December 06, 2011
Export Citation:
Assignee:
HITACHI LTD (JP)
ASHIDA KISHO (JP)
OHTA HIROYUKI (JP)
ASHIDA KISHO (JP)
OHTA HIROYUKI (JP)
International Classes:
G01L1/18; G01B7/16
Domestic Patent References:
| WO2009028283A1 | 2009-03-05 |
Foreign References:
| JPH09264800A | 1997-10-07 | |||
| JP2009229183A | 2009-10-08 | |||
| JP2001272287A | 2001-10-05 | |||
| JP2006266818A | 2006-10-05 |
Other References:
See also references of EP 2796830A4
Attorney, Agent or Firm:
TSUTSUI, YAMATO (JP)
Tsutsui Daiwa (JP)
Tsutsui Daiwa (JP)
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Claims: