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Title:
DYNAMIC QUANTITY SENSOR AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2011/118090
Kind Code:
A1
Abstract:
Disclosed is a dynamic quantity sensor that can be manufactured inexpensively and can detect the magnitude, direction, and acceleration of an outside force. Also disclosed is a method for manufacturing said dynamic quantity sensor. The disclosed dynamic quantity sensor is provided with: a first substrate; a fixed part disposed on top of the first substrate; a spiral-shaped movable electrode which is disposed at a separation from the first substrate and one end of which is supported by the fixed part; fixed electrodes disposed around the movable electrode in directions in which to detect dynamic quantities; a first terminal electrically connected to the fixed part, and a second terminal electrically connected to the fixed electrode.

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Inventors:
ASANO Masaaki (1-1-1, Ichigaya Kagacho, Shinjuku-k, Tokyo 01, 〒1628001, JP)
浅野 雅朗 (〒01 東京都新宿区市谷加賀町一丁目一番一号 大日本印刷株式会社内 Tokyo, 〒1628001, JP)
Application Number:
JP2010/071722
Publication Date:
September 29, 2011
Filing Date:
December 03, 2010
Export Citation:
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Assignee:
DAI NIPPON PRINTING Co., Ltd. (1-1-1, Ichigaya Kagacho Shinjuku-k, Tokyo 01, 〒1628001, JP)
大日本印刷株式会社 (〒01 東京都新宿区市谷加賀町一丁目一番一号 Tokyo, 〒1628001, JP)
ASANO Masaaki (1-1-1, Ichigaya Kagacho, Shinjuku-k, Tokyo 01, 〒1628001, JP)
International Classes:
G01P15/12; B81B3/00; B81C3/00; G01P15/08; G01P15/18; H01L29/84
Foreign References:
JPH1198868A1999-04-09
JPH04335160A1992-11-24
JPH11242052A1999-09-07
Attorney, Agent or Firm:
Takahashi, Hayashi and Partner Patent Attorneys, Inc. (Sonpo Japan Kamata Building 9F, 5-24-2 Kamata Ota-k, Tokyo 52, 〒1440052, JP)
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Claims: