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Title:
DYNAMIC QUANTITY SENSOR AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2018/030045
Kind Code:
A1
Abstract:
This dynamic quantity sensor is provided with: a first substrate (100), a part of which can be displaced in the thickness direction as a movable electrode (105); and a second substrate (200). The second substrate (200) has: a sacrifice layer (202); a supporting layer (203) and an active layer (201), which sandwich the sacrifice layer (202) from both sides; and a fixed electrode (205) configured from a part of the active layer (201). The fixed electrode (205) and an active layer (201) portion different from the fixed electrode (205) are electrically insulated from each other by means of a frame-shaped recessed section (204) formed in the active layer (201), and the second substrate (200) is disposed such that the fixed electrode (205) faces the movable electrode (105).

Inventors:
TAKETANI Eiichi (Showa-cho Kariya-cit, Aichi 61, 〒4488661, JP)
NODA Yoshitaka (Showa-cho Kariya-cit, Aichi 61, 〒4488661, JP)
ABE Ryuichiro (Showa-cho Kariya-cit, Aichi 61, 〒4488661, JP)
YOSHIOKA Tetsuo (Showa-cho Kariya-cit, Aichi 61, 〒4488661, JP)
OGAWA Akira (Showa-cho Kariya-cit, Aichi 61, 〒4488661, JP)
YOSHIDA Yoshinori (Showa-cho Kariya-cit, Aichi 61, 〒4488661, JP)
SAKAI Minekazu (Showa-cho Kariya-cit, Aichi 61, 〒4488661, JP)
Application Number:
JP2017/024868
Publication Date:
February 15, 2018
Filing Date:
July 06, 2017
Export Citation:
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Assignee:
DENSO CORPORATION (1-1 Showa-cho, Kariya-city Aichi, 61, 〒4488661, JP)
International Classes:
G01P15/125; B81B3/00; G01P15/08; H01L29/84
Foreign References:
JP2015219036A2015-12-07
US20110314669A12011-12-29
JP2009147311A2009-07-02
JP2000055931A2000-02-25
Attorney, Agent or Firm:
YOU-I PATENT FIRM (Nagoya Nishiki City Bldg. 4F 1-6-5, Nishiki Naka-ku, Nagoya-sh, Aichi 03, 〒4600003, JP)
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