DYNAMICALLY BALANCED CAPACITIVE PICK-OFF ACCELEROMETER

Title:

DYNAMICALLY BALANCED CAPACITIVE PICK-OFF ACCELEROMETER

Document Type and Number:

WIPO Patent Application WO2005121810

Kind Code:

A9

Abstract:

A Micro Electro-Mechanical System (MEMS) acceleration sensing device formed of a silicon substrate having a substantially planar surface; a pendulous sensing element having a substantially planar surface suspended in close proximity to the substrate planar surface; a flexure suspending the sensing element for motion relative to the substrate planar surface, the flexure having a both static geometric centerline and a dynamic centerline that is offset from the static geometric centerline; and a metal electrode positioned on the substrate surface for forming a capacitor with the pendulous sensing element, the metal electrode being positioned as a function of the dynamic centerline of the flexure.

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Inventors:

MALAMETZ DAVID L (US)

Application Number:

PCT/US2005/019913

Publication Date:

May 31, 2007

Filing Date:

June 07, 2005

Export Citation:

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Assignee:

HONEYWELL INT INC (US)
MALAMETZ DAVID L (US)

International Classes:

G01P15/125; G01P15/00; G01P15/08

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