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Title:
EFEM
Document Type and Number:
WIPO Patent Application WO/2019/177046
Kind Code:
A1
Abstract:
In the present invention, when the supply flow amount of inert gas is changed, a pressure fluctuation in a circulation path is suppressed. This EEFM is provided with: a supply valve that can change the supply flow amount of the inert gas to be supplied to a circulation path; a discharge valve that can change the discharge flow amount of gas to be discharged from the circulation path; a concentration detection unit that detects a change in the atmosphere inside the circulation path; a pressure detection unit that detects the pressure in the circulation path; and a control unit that controls the supply valve and the discharge valve. The control unit decides the opening degree of the discharge valve to be of a predetermined value on the basis of a detection result obtained by the concentration detection unit.

Inventors:
KAWAI, Toshihiro (1-30, Shibadaimon 1-chome, Minato-k, Tokyo 64, 〒1058564, JP)
OGURA, Gengoro (1-30, Shibadaimon 1-chome, Minato-k, Tokyo 64, 〒1058564, JP)
Application Number:
JP2019/010350
Publication Date:
September 19, 2019
Filing Date:
March 13, 2019
Export Citation:
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Assignee:
SINFONIA TECHNOLOGY CO., LTD. (1-30, Shibadaimon 1-chome Minato-k, Tokyo 64, 〒1058564, JP)
International Classes:
H01L21/677
Attorney, Agent or Firm:
KAJI, SUHARA & ASSOCIATES (Recruit Shin Osaka BLDG, 5-14-22 Nishinakajima, Yodogawa-ku, Osaka-sh, Osaka 11, 〒5320011, JP)
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