Title:
EFFICIENT HIGH-HARMONIC-GENERATION-BASED EUV SOURCE DRIVEN BY SHORT WAVELENGTH LIGHT
Document Type and Number:
WIPO Patent Application WO/2011/139303
Kind Code:
A3
Abstract:
Extreme ultraviolet radiation is generated based on high-order harmonic generation. First, a driver pulse is generated from a drive laser. Second, the infrared driver pulse is passed through a second harmonic generator with an output wavelength in the range from 400 to 700nm. Third, the pulse is then passed through a gas medium, which can be inside a resonant cavity, to generate a high-order harmonic in the form of extreme ultraviolet radiation.
Inventors:
KAERTNER FRANZ (US)
FALCAO-FILHO EDILSON (BR)
LAI CHIEN-JEN (US)
HONG KYUNG-HAN (US)
FAN TSO YEE (US)
FALCAO-FILHO EDILSON (BR)
LAI CHIEN-JEN (US)
HONG KYUNG-HAN (US)
FAN TSO YEE (US)
Application Number:
PCT/US2010/060101
Publication Date:
January 05, 2012
Filing Date:
December 13, 2010
Export Citation:
Assignee:
MASSACHUSETTS INST TECHNOLOGY (US)
KAERTNER FRANZ (US)
FALCAO-FILHO EDILSON (BR)
LAI CHIEN-JEN (US)
HONG KYUNG-HAN (US)
FAN TSO YEE (US)
KAERTNER FRANZ (US)
FALCAO-FILHO EDILSON (BR)
LAI CHIEN-JEN (US)
HONG KYUNG-HAN (US)
FAN TSO YEE (US)
International Classes:
H01S3/09; H01S3/05
Foreign References:
| US20090238222A1 | 2009-09-24 | |||
| US5394411A | 1995-02-28 | |||
| US20080144672A1 | 2008-06-19 |
Attorney, Agent or Firm:
SAYRE, Robert (1 Broadway 14th Floo, Cambridge US, US)
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