Title:
ELASTIC BODY INSPECTION METHOD, INSPECTION DEVICE, AND DIMENSION PREDICTION PROGRAM
Document Type and Number:
WIPO Patent Application WO/2005/104258
Kind Code:
A1
Abstract:
There is provided an inspection method for inspecting a piezoelectric/electrostrictive actuator including a piezoelectric/electrostrictive body and at least two electrodes. The inspection method picks up frequency characteristic when the piezoelectric/electrostrictive actuator is vibrated and according to the frequency characteristic, the displacement amount of the piezoelectric/electrostrictive actuator is measured. Thus, the method can inspect the piezoelectric/electrostrictive actuator with a high accuracy without disassembling or destroying the actuator and without performing actual drive as a product.
Inventors:
Yamada, Tomohiro c/o NGK INSULATORS LTD. (2-56, Suda-cho, Mizuho-ku, Nagoya-sh, Aichi 30, 46785, JP)
Komazawa, Masato c/o NGK INSULATORS LTD. (2-56, Suda-cho, Mizuho-ku, Nagoya-sh, Aichi 30, 46785, JP)
Hatta, Tetsuya c/o NGK INSULATORS LTD. (2-56, Suda-cho, Mizuho-ku, Nagoya-sh, Aichi 30, 46785, JP)
Nehagi, Takatoshi c/o NGK INSULATORS LTD. (2-56, Suda-cho, Mizuho-ku, Nagoya-sh, Aichi 30, 46785, JP)
Komazawa, Masato c/o NGK INSULATORS LTD. (2-56, Suda-cho, Mizuho-ku, Nagoya-sh, Aichi 30, 46785, JP)
Hatta, Tetsuya c/o NGK INSULATORS LTD. (2-56, Suda-cho, Mizuho-ku, Nagoya-sh, Aichi 30, 46785, JP)
Nehagi, Takatoshi c/o NGK INSULATORS LTD. (2-56, Suda-cho, Mizuho-ku, Nagoya-sh, Aichi 30, 46785, JP)
Application Number:
PCT/JP2005/008042
Publication Date:
November 03, 2005
Filing Date:
April 27, 2005
Export Citation:
Assignee:
NGK INSULATORS, LTD. (2-56, Suda-cho Mizuho-ku, Nagoya-sh, Aichi 30, 46785, JP)
Yamada, Tomohiro c/o NGK INSULATORS LTD. (2-56, Suda-cho, Mizuho-ku, Nagoya-sh, Aichi 30, 46785, JP)
Komazawa, Masato c/o NGK INSULATORS LTD. (2-56, Suda-cho, Mizuho-ku, Nagoya-sh, Aichi 30, 46785, JP)
Hatta, Tetsuya c/o NGK INSULATORS LTD. (2-56, Suda-cho, Mizuho-ku, Nagoya-sh, Aichi 30, 46785, JP)
Nehagi, Takatoshi c/o NGK INSULATORS LTD. (2-56, Suda-cho, Mizuho-ku, Nagoya-sh, Aichi 30, 46785, JP)
Yamada, Tomohiro c/o NGK INSULATORS LTD. (2-56, Suda-cho, Mizuho-ku, Nagoya-sh, Aichi 30, 46785, JP)
Komazawa, Masato c/o NGK INSULATORS LTD. (2-56, Suda-cho, Mizuho-ku, Nagoya-sh, Aichi 30, 46785, JP)
Hatta, Tetsuya c/o NGK INSULATORS LTD. (2-56, Suda-cho, Mizuho-ku, Nagoya-sh, Aichi 30, 46785, JP)
Nehagi, Takatoshi c/o NGK INSULATORS LTD. (2-56, Suda-cho, Mizuho-ku, Nagoya-sh, Aichi 30, 46785, JP)
International Classes:
G01H11/08; G01H13/00; G01N29/04; G01N29/12; G01N29/42; H01H57/00; H01L41/08; H01L41/22; H01L41/09; (IPC1-7): H01L41/22; H01H57/00; H01L41/08; H01L41/09
Attorney, Agent or Firm:
Watanabe, Kazuhira (3rd Fl, No.8 Kikuboshi Tower Building 20-18,
Asakusabashi 3-chom, Taito-ku Tokyo 53, 11100, JP)
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