Title:
ELASTIC WAVE DEVICE AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2017/212774
Kind Code:
A1
Abstract:
Provided is an elastic wave device having excellent moisture resistance.
An elastic wave device 1 is provided with: a supporting substrate 2, the upper surface of which is provided with a recessed section 2c; a piezoelectric thin film 4 that is provided on the supporting substrate 2 such that the recessed section 2c of the supporting substrate 2 is covered with the piezoelectric thin film; an IDT electrode 5 that is provided on a main surface 4a of the piezoelectric thin film 4, said main surface being on the supporting substrate 2 side; and an intermediate layer 8 that is provided on a main surface 4b of the piezoelectric thin film 4, said main surface being on the side opposite to the supporting substrate 2. A space 9 surrounded by the supporting substrate 2 and the piezoelectric thin film 4 is configured, and the IDT electrode 5 is disposed such that the IDT electrode faces the space 9. The piezoelectric thin film 4 and the intermediate layer 8 are provided with through holes 11, 12, which reach the space 9 from a main surface 8B of the intermediate layer 8, said main surface being on the side opposite to the piezoelectric thin film 4, and the elastic wave device is also provided with a cover member 19 that is provided on the intermediate layer 8 such that opening ends of the through holes 11, 12 are covered with the cover member.
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Inventors:
KIMURA TETSUYA (JP)
KISHIMOTO YUTAKA (JP)
OMURA MASASHI (JP)
KISHIMOTO YUTAKA (JP)
OMURA MASASHI (JP)
Application Number:
PCT/JP2017/014759
Publication Date:
December 14, 2017
Filing Date:
April 11, 2017
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/25; H03H3/08
Domestic Patent References:
| WO2012073871A1 | 2012-06-07 | |||
| WO2012086441A1 | 2012-06-28 | |||
| WO2015098679A1 | 2015-07-02 | |||
| WO2010082571A1 | 2010-07-22 |
Foreign References:
| JP2009094975A | 2009-04-30 | |||
| JP2006101092A | 2006-04-13 |
Attorney, Agent or Firm:
MIYAZAKI & METSUGI (JP)
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