Title:
ELASTIC WAVE DEVICE AND METHOD FOR MANUFACTURING ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/071605
Kind Code:
A1
Abstract:
The present invention suppresses deterioration in filter characteristics caused by residue on an inorganic film. This elastic wave device comprises a support substrate, an inorganic film provided on the support substrate, a piezoelectric layer provided on the inorganic film, and an electrode provided on the piezoelectric layer. A hollow section is provided in part of the support substrate. The hollow section overlaps at least part of the electrode in the thickness direction of the support substrate. The inner wall of the inorganic film is located at a position that is set apart from the hollow section, further than is the position closest to the piezoelectric-layer side within the inner wall of the support substrate forming the hollow section.
Inventors:
INOUE KAZUNORI (JP)
NODAKE NAOHIRO (JP)
NODAKE NAOHIRO (JP)
Application Number:
PCT/JP2021/036531
Publication Date:
April 07, 2022
Filing Date:
October 01, 2021
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/25
Domestic Patent References:
| WO2012073871A1 | 2012-06-07 | |||
| WO2017163729A1 | 2017-09-28 | |||
| WO2019111664A1 | 2019-06-13 | |||
| WO2016147687A1 | 2016-09-22 |
Foreign References:
| JP2020150415A | 2020-09-17 |
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
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