Title:
ELASTIC WAVE DEVICE AND METHOD FOR MANUFACTURING ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/080462
Kind Code:
A1
Abstract:
Provided is an acoustic wave device for improving moisture resistance of an electrode part. The acoustic wave device comprises: a piezoelectric layer having a first main surface and a second main surface facing in opposite directions to each other; at least one pair of electrodes provided on the first main surface facing an intersection direction that intersects with the thickness direction of the piezoelectric layer; a frame-shaped support substrate that is provided on the second main surface, overlaps at least a part of the at least one pair of electrodes in plan view in the thickness direction, and has a first cavity part penetrating the support substrate; a resin sheet that is provided to the opposite side of the support substrate than the piezoelectric layer and that closes the first cavity part; a metal frame that forms a frame shape having a second cavity part, is provided on the first main surface, and surrounds the piezoelectric layer and the pair of electrodes; and an inorganic sheet that is made from an inorganic material, is provided to the opposite side of the metal frame than the piezoelectric layer, and closes the second cavity part.
Inventors:
INOUE KAZUNORI (JP)
Application Number:
PCT/JP2021/038099
Publication Date:
April 21, 2022
Filing Date:
October 14, 2021
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/25
Domestic Patent References:
| WO2017098809A1 | 2017-06-15 |
Foreign References:
| US20200321939A1 | 2020-10-08 | |||
| JP2013528996A | 2013-07-11 |
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
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