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Title:
ELASTIC WAVE DEVICE AND ELASTIC WAVE MODULE EQUIPPED WITH SAME
Document Type and Number:
WIPO Patent Application WO/2019/044310
Kind Code:
A1
Abstract:
This elastic wave device (110) is provided with a cover part (10), an outer periphery support layer (20), a support part (25), a piezoelectric substrate (30), and a plurality of functional elements (40) formed on the piezoelectric substrate (30). The outer periphery support layer (20) is disposed within a region in which the plurality of functional elements (40) are formed on the piezoelectric substrate (30). The cover part (10) is disposed facing the piezoelectric substrate (30), with the outer periphery support layer (20) therebetween. The support part (25) is disposed in an empty space formed by the piezoelectric substrate (30), the outer periphery support layer (20), and the cover part (10). The height of the support part (25) is lower than the height of the outer periphery support layer (20) and higher than the heights of the plurality of functional elements (40). A gap is formed between the support part (25) and the cover part (10), or between the support part (25) and the piezoelectric substrate (30).

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Inventors:
KAWASAKI, Koichiro (10-1, Higashikotari 1-chome, Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
Application Number:
JP2018/028220
Publication Date:
March 07, 2019
Filing Date:
July 27, 2018
Export Citation:
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Assignee:
MURATA MANUFACTURING CO., LTD. (10-1, Higashikotari 1-chome Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
International Classes:
H03H9/25
Domestic Patent References:
WO2016208428A12016-12-29
WO2016158050A12016-10-06
Foreign References:
US20170162518A12017-06-08
JP2018014717A2018-01-25
Attorney, Agent or Firm:
FUKAMI PATENT OFFICE, P.C. (Nakanoshima Festival Tower West, 2-4 Nakanoshima 3-chome, Kita-ku, Osaka-sh, Osaka 05, 〒5300005, JP)
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