Title:
ELASTIC WAVE DEVICE AND MULTIPLEXER
Document Type and Number:
WIPO Patent Application WO/2020/158673
Kind Code:
A1
Abstract:
An elastic wave device of the present invention uses SH waves as a main mode and comprises: a substrate (2); an interdigital transducer (IDT) electrode (3) having electrode fingers (4a, 4b) formed on a main surface of the substrate (2); and a protective film (6) which continuously covers the main surface of the substrate (2) and the side surfaces and top surfaces of the electrode fingers (4a, 4b), wherein, from among the portions of the protective film (6) covering the main surface of the substrate (2), a central section between the adjacent electrode fingers (4a, 4b) is thicker than nearby sections near the electrode fingers (4a, 4b).
Inventors:
MICHIGAMI AKIRA (JP)
Application Number:
PCT/JP2020/002804
Publication Date:
August 06, 2020
Filing Date:
January 27, 2020
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/145; H03H9/25; H03H9/72
Domestic Patent References:
| WO2018003657A1 | 2018-01-04 | |||
| WO2008087836A1 | 2008-07-24 | |||
| WO2012120879A1 | 2012-09-13 | |||
| WO2018221427A1 | 2018-12-06 | |||
| WO2002035702A1 | 2002-05-02 | |||
| WO2003088483A1 | 2003-10-23 |
Foreign References:
| JP2013145930A | 2013-07-25 | |||
| JP2011135468A | 2011-07-07 | |||
| JP2018093487A | 2018-06-14 | |||
| JP2009118369A | 2009-05-28 |
Attorney, Agent or Firm:
YOSHIKAWA, Shuichi et al. (JP)
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