ELASTIC WAVE DEVICE AND PRODUCTION METHOD THEREOF

Title:

ELASTIC WAVE DEVICE AND PRODUCTION METHOD THEREOF

Document Type and Number:

WIPO Patent Application WO/2012/086441

Kind Code:

A1

Abstract:

Provided is an elastic wave device utilizing Lamb waves that enables the production process to be simplified, and that also has excellent mechanical strength, ease of use and improved temperature performance, without requiring the formation of a cavity. The elastic wave device (1) has an acoustic reflecting layer (3), a piezoelectric material layer (4) and an IDT electrode (5) layered on a support substrate (2), the thickness of the piezoelectric material layer (4) being smaller than the cycle of electrode fingers of the IDT electrode (5), and propagates Lamb waves, wherein the acoustic reflecting layer (3) has low acoustic impedance layers (3b,3d,3f,3h) and high acoustic impedance layers (3a,3c,3e,3g), the low acoustic impedance layers comprising SiO2, and the high acoustic impedance layers comprising at least one material selected from the group of W, LiTaO3, Al2O3, AlN, LiNbO3, SiN and ZnO.

Inventors:

KIMURA TETSUYA (JP)
OGAMI TAKASHI (JP)
DAIMON KATSUYA (JP)

Application Number:

PCT/JP2011/078696

Publication Date:

June 28, 2012

Filing Date:

December 12, 2011

Export Citation:

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Assignee:

MURATA MANUFACTURING CO (JP)
KIMURA TETSUYA (JP)
OGAMI TAKASHI (JP)
DAIMON KATSUYA (JP)

International Classes:

H03H9/145; H03H3/08; H03H9/25

Domestic Patent References:

WO2009081651A1	2009-07-02
WO2007046236A1	2007-04-26

Foreign References:

JP2008530874A	2008-08-07
JP2006121259A	2006-05-11
JP2002041052A	2002-02-08

Other References: