ELASTIC WAVE DEVICE AND PRODUCTION METHOD THEREOF

Title:

ELASTIC WAVE DEVICE AND PRODUCTION METHOD THEREOF

Document Type and Number:

WIPO Patent Application WO/2012/086639

Kind Code:

A1

Abstract:

Provided is an elastic wave device that can be used at high frequencies, and that is capable of increasing the Q value. The elastic wave device (1) comprises a high acoustic velocity film (3) layered on a support substrate (2), wherein the propagating bulk acoustic wave velocity is a higher velocity than the elastic acoustic wave velocity propagating a piezoelectric film (5), a low acoustic velocity film (4) layered on the high acoustic velocity film (3), wherein the propagating bulk acoustic wave velocity is a lower velocity than the bulk acoustic wave velocity propagating the piezoelectric film (5), the piezoelectric film (5) layered on the low acoustic velocity film (4), and an IDT electrode (6) layered on one side of the piezoelectric film (5).

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WO/2018/003657	ELASTIC WAVE DEVICE
JPS62295504	SURFACE ACOUSTIC WAVE DEVICE

Inventors:

KIDO SYUNSUKE (JP)
IWAMOTO HIDEKI (JP)
KANDO HAJIME (JP)
WATANABE MUNEHISA (JP)

Application Number:

PCT/JP2011/079496

Publication Date:

June 28, 2012

Filing Date:

December 20, 2011

Export Citation:

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Assignee:

MURATA MANUFACTURING CO (JP)
KIDO SYUNSUKE (JP)
IWAMOTO HIDEKI (JP)
KANDO HAJIME (JP)
WATANABE MUNEHISA (JP)

International Classes:

H03H9/145; H03H3/08; H03H9/25

Foreign References:

JP2005354650A	2005-12-22
JP2007228120A	2007-09-06
JP2010251964A	2010-11-04
JP2008067289A	2008-03-21
JPH11274883A	1999-10-08
JP2003017967A	2003-01-17
JP2007228225A	2007-09-06
JP2006270360A	2006-10-05
JP2004282232A	2004-10-07
JP2002534886A	2002-10-15

Other References: