ELASTIC WAVE DEVICE AND PRODUCTION METHOD FOR SAME

WIPO Patent Application WO/2016/147687

A1

Provided is an elastic wave device that has a hollow structure and that has a piezoelectric substrate that does not easily break. An elastic wave device 1 that is provided with: a support substrate 2 that has a recessed part 2c in an upper surface 2a thereof; a thin film 6 that is arranged upon the support substrate 2; a piezoelectric substrate 4 that has a first main surface 4a and a second main surface 4b that is on the reverse side from the first main surface 4a, wherein the first main surface 4a is arranged upon the thin film 6; and an IDT electrode 5 that is provided upon the second main surface 4b. A cavity 9 is formed so as to be enclosed by the support substrate 2 and, from among the thin film 6 and the piezoelectric substrate 4, by at least the thin film 6. With respect to regions of the first main surface 4a of the piezoelectric substrate 4, the thin film 6 is arranged in at least one portion of a region that is above the cavity 9 and in a region that is connected to the support substrate 2 via the thin film 6.

KISHIMOTO YUTAKA (JP)
KIMURA TETSUYA (JP)

PCT/JP2016/051029

September 22, 2016

January 14, 2016

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MURATA MANUFACTURING CO (JP)

H03H9/25; H03H9/145

WO2012073871A1

2012-06-07

JP2006186900A	2006-07-13
JP2010109949A	2010-05-13
JP2002152007A	2002-05-24
JP2011066590A	2011-03-31
JP2010154315A	2010-07-08
JP2012165132A	2012-08-30

MIYAZAKI & METSUGI (JP)
Patent business corporation Miyazaki and table-of-contents patent firm (JP)

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