ELASTIC WAVE DEVICE

WIPO Patent Application WO/2015/022856

A1

Provided is an elastic wave device wherein a leak failure of hollow sections which elastic wave element sections face is not easily generated. Disclosed is an elastic wave device (1) wherein: a plurality of elastic wave element sections, each of which has an IDT electrode, are configured on a piezoelectric substrate (2); a supporting layer (16) that surrounds the elastic wave element sections is provided on the piezoelectric substrate (2) such that hollow sections, which the elastic wave element sections face, are formed; the hollow sections, which the elastic wave element sections face, are configured by laminating a cover member on the supporting layer (16); the supporting layer (16) has a first supporting layer (17) and a second supporting layer (18), and the first supporting layer (17) is provided along an outer circumferential end of the piezoelectric substrate (2), and the second supporting layer (18) is positioned in a region surrounded by the first supporting layer (17), and is provided around the elastic wave element sections so as to have the hollow sections that have the elastic wave element sections therein; and a hollow path (19) is provided between the first supporting layer (17) and the second supporting layer (18), said hollow path (19) being provided to have at least two hollow sections communicate with each other.

HIRA MITSUYOSHI (JP)
KAI SEIJI (JP)

PCT/JP2014/069905

February 19, 2015

July 29, 2014

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MURATA MANUFACTURING CO (JP)

H03H9/25; H01L23/02

WO2006006343A1

2006-01-19

JP2010278972A	2010-12-09
JP2008235432A	2008-10-02
JP2003283289A	2003-10-03

MIYAZAKI & METSUGI (JP)
Patent business corporation Miyazaki and table-of-contents patent firm (JP)

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