Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/068828
Kind Code:
A1
Abstract:
Provided is an elastic wave device in which a piezoelectric substrate does not readily warp, and characteristics do not readily deteriorate. This elastic wave device 1 is provided with: a support substrate 2; an acoustic multilayer film 3 provided on the support substrate 2; a piezoelectric substrate 4 provided on the acoustic multilayer film 3; and an IDT electrode 5 provided on the piezoelectric substrate 4. The absolute value of the thermal expansion coefficient of the piezoelectric substrate 4 is greater than the absolute value of the thermal expansion coefficient of the support substrate 2. The acoustic multilayer film 3 is provided with at least four acoustic impedance layers. A bonding layer is further provided which is provided in any position from the centre of the first acoustic impedance layer 3g from the piezoelectric substrate 4 side to the support substrate 2 side, to the interface between the third acoustic impedance layer 3e and the fourth acoustic impedance layer 3d.
Inventors:
KISHIMOTO YUTAKA (JP)
KIMURA TETSUYA (JP)
OMURA MASASHI (JP)
KIMURA TETSUYA (JP)
OMURA MASASHI (JP)
Application Number:
PCT/JP2016/071725
Publication Date:
April 27, 2017
Filing Date:
July 25, 2016
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/145
Domestic Patent References:
| WO2012086441A1 | 2012-06-28 |
Foreign References:
| JP2013223025A | 2013-10-28 | |||
| JP2013258373A | 2013-12-26 |
Attorney, Agent or Firm:
MIYAZAKI & METSUGI (JP)
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