Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/187747
Kind Code:
A1
Abstract:
Provided is an elastic wave device from which a via hole electrode is difficult to remove. An elastic wave device 1 is provided with: a piezoelectric substrate 2; an IDT electrode 3 provided on the piezoelectric substrate 2; a support member 5 provided on the piezoelectric substrate 2, the support member 5 having an opening part 5a, and surrounding the IDT electrode 3 at the opening part 5a; a cover member 6 that covers the opening part 5a and is provided on the support member 5; and a via hole electrode 7A that passes through the cover member 6 and the support member 5. The via hole electrode 7A has a flared part 7a1 that is flared outward from a side surface part in plan view. The flared part 7a1 is positioned inside the cover member 6.
Inventors:
FUKUDA DAISUKE (JP)
Application Number:
PCT/JP2017/006910
Publication Date:
November 02, 2017
Filing Date:
February 23, 2017
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/25; H03H9/145
Domestic Patent References:
| WO2010125873A1 | 2010-11-04 |
Foreign References:
| JP2016010026A | 2016-01-18 |
Attorney, Agent or Firm:
MIYAZAKI & METSUGI (JP)
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