Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/097016
Kind Code:
A1
Abstract:
[Problem] To provide an elastic wave device that has a superior TCF and that is capable of enhancing the Q and the impedance ratio of a resonator. [Solution] The present invention has: a substrate 11 containing silicon dioxide (SiO2) in an amount of 70 mass% or more; a piezoelectric thin film 12 formed of LiTaO3 crystal or LiNbO3 crystal provided on the substrate 11; and an interdigital transducer 13 provided so as to be in contact with the piezoelectric thin film 12.
Inventors:
KADOTA MICHIO (JP)
TANAKA SHUJI (JP)
TANAKA SHUJI (JP)
Application Number:
PCT/JP2017/041165
Publication Date:
May 31, 2018
Filing Date:
November 15, 2017
Export Citation:
Assignee:
UNIV TOHOKU (JP)
International Classes:
H03H9/25; H03H9/145
Domestic Patent References:
| WO2016147687A1 | 2016-09-22 | |||
| WO2011046117A1 | 2011-04-21 | |||
| WO2011037145A1 | 2011-03-31 |
Foreign References:
| JP2004282232A | 2004-10-07 | |||
| JPH10178331A | 1998-06-30 | |||
| JP2000278088A | 2000-10-06 | |||
| JP2000278087A | 2000-10-06 | |||
| JP2016123016A | 2016-07-07 | |||
| JP2011066492A | 2011-03-31 | |||
| JP2004215227A | 2004-07-29 |
Attorney, Agent or Firm:
SUDA Atsushi et al. (JP)
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