Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/241776
Kind Code:
A1
Abstract:
Provided is an elastic wave device that can effectively suppress higher-order modes. This elastic wave device 1 comprises a support substrate 4 that comprises silicon, a piezoelectric layer 6 that is provided directly or indirectly on the support substrate 4, and an IDT electrode 3 that is provided on the piezoelectric layer 6. The elastic wave device satisfies the condition that the φ of the Euler angles (φ, θ, ψ) of the support substrate 4 satisfies -55°<φ<-45° or -45°<φ<-33° and/or the condition that the θ of the Euler angles (φ, θ, ψ) of the support substrate 4 satisfies -60°<θ<θM or θM<θ<-45°, θM being the θ of the Euler angles (φ, θ, ψ) of the (111) plane of silicon.
Inventors:
IWAMOTO HIDEKI (JP)
MICHIGAMI AKIRA (JP)
TAKAI TSUTOMU (JP)
NAKAO TAKESHI (JP)
MICHIGAMI AKIRA (JP)
TAKAI TSUTOMU (JP)
NAKAO TAKESHI (JP)
Application Number:
PCT/JP2020/021187
Publication Date:
December 03, 2020
Filing Date:
May 28, 2020
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/25
Domestic Patent References:
| WO2018164211A1 | 2018-09-13 |
Attorney, Agent or Firm:
MIYAZAKI & METSUGI (JP)
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