Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/002382
Kind Code:
A1
Abstract:
The present invention suppresses harmonic distortion. This elastic wave device (1) comprises: a silicon substrate (2); a piezoelectric layer (4); and an IDT electrode (5). The silicon substrate (2) has a first main surface (21) and a second main surface (22) that face each other. The piezoelectric layer (4) has a first main surface (41) and a second main surface (42) that face each other. The piezoelectric layer (4) is provided on the first main surface (21) of the silicon substrate (2). The IDT electrode (5) is provided on the first main surface (41) of the piezoelectric layer (4). The IDT electrode (5) has a plurality of first electrode fingers (53) and a plurality of second electrode fingers (54). Taking λ to be the wavelength of the elastic wave determined by the electrode finger pitch of the IDT electrode (5), the distance between the first main surface (21) of the silicon substrate (2) and the second main surface (42) of the piezoelectric layer (4) in the thickness direction (D1) of the silicon substrate (2) is shorter than 0.84 λ. The first main surface (21) of the silicon substrate (2) is rougher than the first main surface (41) of the piezoelectric layer (4).
Inventors:
TANIGUCHI YASUMASA
OKADA TAKURO
WATANABE MUNEHISA
OKADA TAKURO
WATANABE MUNEHISA
Application Number:
PCT/JP2020/025780
Publication Date:
January 07, 2021
Filing Date:
July 01, 2020
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/25
Domestic Patent References:
| WO2018016314A1 | 2018-01-25 | |||
| WO2018163805A1 | 2018-09-13 | |||
| WO2018002504A1 | 2018-01-04 | |||
| WO2017163723A1 | 2017-09-28 | |||
| WO2018016169A1 | 2018-01-25 |
Foreign References:
| JP2015115870A | 2015-06-22 | |||
| JP2010161697A | 2010-07-22 |
Attorney, Agent or Firm:
HOKUTO PATENT ATTORNEYS OFFICE (JP)
Download PDF: