ELASTIC WAVE DEVICE

WIPO Patent Application WO/2021/006156

A1

Provided is an elastic wave device which can suppress separation of a cover member from support members, and which can suppress separation of the support members from a piezoelectric substrate.　This elastic wave device 1 is provided with: a piezoelectric substrate 2; an IDT electrode 3 (a vibration electrode); support members 4 which are provided on the piezoelectric substrate 2 so as to surround the IDT electrode 3, each having first and second end surfaces 4a, 4b opposing each other, an outer side surface 4c, and an inner side surface 4d; and a cover member 5 which is provided on the second end surfaces 4b. When the distance between the outer side surface 4c and the inner side surface 4d along a direction parallel to a main surface 2a of the piezoelectric substrate 2 is set as the width of the support members 4, said support members 4 each have a narrow width section 4X which is positioned between a first end surface 4a and a second end surface 4b thereof. The inner side surfaces 4d are inclined such that the width of the support members 4 narrows approaching the second end surfaces 4b, and have a first inclined section 4h which reaches the respective second end surfaces 4b. The cover member 5 reaches from the second end surface 4b to the first inclined section 4h of the inner side surface 4d of each of the support members 4.

INOUE KAZUNORI (JP)
OTSUKA SHINTARO (JP)
KAWASAKI KOICHIRO (JP)
FUKUSHIMA MASAHIRO (JP)
ATARASHI MASAKAZU (JP)
NAKANISHI HIDEFUMI (JP)
FUJITA IWAO (JP)
FUKUDA DAISUKE (JP)

PCT/JP2020/025871

January 14, 2021

July 01, 2020

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MURATA MANUFACTURING CO (JP)

H03H9/25

WO2018110057A1

2018-06-21

JP2013074411A

2013-04-22

MIYAZAKI & METSUGI (JP)

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