Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/200677
Kind Code:
A1
Abstract:
Provided is an elastic wave device in which intermodulation distortion (IMD) can be effectively suppressed. An elastic wave device 10 of the present invention is provided with a piezoelectric body layer 2, first and second upper electrodes 3A, 3B, first and second lower electrodes 4A, 4B, and first and second acoustic reflective films 5A, 5B. In plan view, the first upper electrode 3A and the first lower electrode 4A overlap in a portion that is a first resonator portion A, and the second upper electrode 3B and the second lower electrode 4B overlap in a portion that is a second resonator portion B. The first acoustic reflective film 5A includes a first metal layer, and the second acoustic reflective film 5B includes a second metal layer. In plan view, only the first upper electrode 3A overlaps the first metal layer in a portion that is a first overlap portion C, and only the second upper electrode 3B overlaps the second metal layer in a portion that is a second overlap portion D. The area of the first resonator portion A in plan view is smaller than the area of the second resonator portion B in plan view, and the area of the first overlap portion C in plan view is greater than the area of the second overlap portion D in plan view.
Inventors:
TANIGUCHI YASUMASA (JP)
Application Number:
PCT/JP2021/012923
Publication Date:
October 07, 2021
Filing Date:
March 26, 2021
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/25; H03H9/17; H03H9/54
Domestic Patent References:
| WO2018235731A1 | 2018-12-27 | |||
| WO2019065666A1 | 2019-04-04 | |||
| WO2019065669A1 | 2019-04-04 | |||
| WO2020009121A1 | 2020-01-09 |
Foreign References:
| JP2006339873A | 2006-12-14 | |||
| JP2018207376A | 2018-12-27 | |||
| JP2004173191A | 2004-06-17 |
Attorney, Agent or Firm:
MIYAZAKI & METSUGI (JP)
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