Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/085624
Kind Code:
A1
Abstract:
Provided is an elastic wave device capable of suppressing higher order modes in a wide band. An elastic wave device 1 according to the present invention comprises: a support substrate 2; a crystal layer 4 (SiO2 layer having crystallinity) directly or indirectly provided on the support substrate 2; a piezoelectric layer 5 provided on the crystal layer 4; and an IDT electrode 7 provided on the piezoelectric layer 5. The thickness of the crystal layer 4 is 0.2-0.4 λ, where λ indicates a wavelength defined by the electrode finger pitch of the IDT electrode 7, and the thickness of the piezoelectric layer 5 is less than that of the crystal layer 4.
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Inventors:
YAMAUCHI JUNJI (JP)
NAKAMURA KENTARO (JP)
DAIMON KATSUYA (JP)
NAKAMURA KENTARO (JP)
DAIMON KATSUYA (JP)
Application Number:
PCT/JP2021/038418
Publication Date:
April 28, 2022
Filing Date:
October 18, 2021
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/25
Domestic Patent References:
| WO2018203430A1 | 2018-11-08 | |||
| WO2020184621A1 | 2020-09-17 |
Foreign References:
| JP2019186655A | 2019-10-24 | |||
| JP2019036963A | 2019-03-07 |
Attorney, Agent or Firm:
MIYAZAKI & METSUGI (JP)
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