Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/107606
Kind Code:
A1
Abstract:
Provided is an elastic wave device which can achieve improvements in characteristics and mechanical strength. This elastic wave device 1 comprises an intermediate film 3, a piezoelectric film 4, and a first electrode 5, which are stacked in this order on a support substrate 2, wherein; when a first main surface 4a of the piezoelectric film 4 is viewed in a plan view, a cavity part 7 is provided so as to overlap at least a portion of the first electrode 5 on the side of a second main surface 4b of the piezoelectric film 4; and a groove part 10 is provided which passes through at least a portion of the piezoelectric film 4 and does not reach the cavity part 7.
Inventors:
KISHIMOTO YUTAKA (JP)
OMURA MASASHI (JP)
OMURA MASASHI (JP)
Application Number:
PCT/JP2021/040618
Publication Date:
May 27, 2022
Filing Date:
November 04, 2021
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/17; H03H9/25
Domestic Patent References:
| WO2020026735A1 | 2020-02-06 | |||
| WO2019124128A1 | 2019-06-27 | |||
| WO2018096783A1 | 2018-05-31 |
Foreign References:
| JP2013223025A | 2013-10-28 | |||
| JP2018170343A | 2018-11-01 | |||
| JP2011091639A | 2011-05-06 | |||
| JP2013128273A | 2013-06-27 |
Attorney, Agent or Firm:
MIYAZAKI & METSUGI (JP)
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