Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/138552
Kind Code:
A1
Abstract:
Provided is an elastic wave device that can increase heat dissipation from a cavity part in a support member. This elastic wave device 10 comprises a support member 13 having a support substrate 16, a piezoelectric layer 14, an IDT electrode 25 having a plurality of first and second electrode fingers 28, 29 provided on the piezoelectric layer 14, and a pair of wiring electrodes to which one end of each of the plurality of first and second electrode fingers is connected. Each of the pair of wiring electrodes includes a bus bar. One end of each of the plurality of first and second electrode fingers 28, 29 is connected to the pair of bus bars. The IDT electrode 25 is configured from the pair of bus bars and the plurality of first and second electrode fingers 28, 29. A cavity part 13c that is open at the piezoelectric-layer 14 side is provided in the support member 13. A region in which adjacent first and second electrode fingers 28, 29 overlap as seen from a direction orthogonal to the direction in which the plurality of first and second electrode fingers 28, 29 extend is an intersecting region. The cavity part 13c is arranged so as to include the intersecting region in plan view. First and second through-holes 14c, 14d that directly or indirectly reach the cavity part 13c are provided in the piezoelectric layer 14. The first and second through-holes 14c, 14d face each other so as to sandwich the intersecting region. In plan view, the total area of the first through-hole 14c and the total area of the second through-hole 14d are mutually different.
Inventors:
INOUE KAZUNORI (JP)
Application Number:
PCT/JP2021/046995
Publication Date:
June 30, 2022
Filing Date:
December 20, 2021
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/145; H03H9/25
Domestic Patent References:
| WO2016147687A1 | 2016-09-22 |
Foreign References:
| JP2014013991A | 2014-01-23 | |||
| JP2010233210A | 2010-10-14 | |||
| JP2013528996A | 2013-07-11 | |||
| US20200321939A1 | 2020-10-08 | |||
| JP2016086308A | 2016-05-19 |
Attorney, Agent or Firm:
MIYAZAKI & METSUGI (JP)
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