Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/138739
Kind Code:
A1
Abstract:
This invention curbs the occurrence of cracking in a piezoelectric layer. This elastic wave device is provided with: a support member having a support substrate; a piezoelectric layer containing lithium niobate or lithium tantalate which is provided in a first direction of the substrate member that is the thickness direction of the support substrate; a first busbar and a second busbar that are provided in the first direction of the piezoelectric layer and face one another; an IDT electrode comprising a plurality of first electrode fingers having a proximal end connected to the first busbar and a plurality of second electrode fingers having a proximal end connected to the second busbar; and a reinforcing film provided in the first direction of the piezoelectric layer. A cavity part opening to the piezoelectric layer side of the first direction is provided to the support member. The reinforcing film is provided so as to overlap, as seen in plan view in the first direction, with at least part of a boundary between a region where the piezoelectric layer and the cavity part overlap and a region where the piezoelectric layer and the cavity part do not overlap.
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Inventors:
INOUE KAZUNORI (JP)
Application Number:
PCT/JP2021/047631
Publication Date:
June 30, 2022
Filing Date:
December 22, 2021
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/145; H03H9/25
Domestic Patent References:
| WO2016103925A1 | 2016-06-30 |
Foreign References:
| JP2011066590A | 2011-03-31 | |||
| JP2010154315A | 2010-07-08 | |||
| US20190386635A1 | 2019-12-19 | |||
| US7369014B1 | 2008-05-06 | |||
| US20190074813A1 | 2019-03-07 |
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
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